Andrew R . Neureuther : Set 3 201 - 275 from 1995 - 2001
نویسنده
چکیده
Focus shift and process latitude of contact holes on attenuated phase-shifting masks, " Proc. Reaction diffusion in deep-UV positive tone resist systems, " Proc. Three-dimensional reflective-notching simulation using multipole accelerated physical-optics approximation, " Proc. Extracting solid conductors from a single triangulated surface representation for interconnect analysis, " IEEE Trans.
منابع مشابه
Defocus based phase imaging for quantifying electromagnetic edge effects in photomasks
Defocus based phase imaging for quantifying electromagnetic edge effects in photomasks
متن کاملSimplified Models for Edge Transitions in Rigorous Mask Modeling
A new method is described for very accurate and rapid 3D simulation of alternating phase-shifting masks. This method for arbitrary 2D mask patterns is based on scalar imaging theory and is therefore much faster (200X or more) than rigorous 3D electromagnetic simulation. It is shown that an alternating phase-shifting mask can be decomposed into single openings and, subsequently, accurate scalar ...
متن کاملOcean Thermal Energy Conversion (otec)
eddying ocean. Journal of Marine Research 55: 201}222. Marshall JC, Nurser AJG and Williams RG (1993). Inferring the subduction rate and period over the North Atlantic. Journal of Physical Oceanography 23: 1315}1329. McDowell S, Rhines PB and Keffer T (1982) North Atlantic potential vorticity and its relation to the general circulation. Journal of Physical Oceanography 12: 1417}1436. Pedlosky J...
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